Read Deposition of Adherent Ag-Ti Duplex Films on Ceramics in a Multiple-Cathode Sputter Deposition System - National Aeronautics and Space Administration | PDF Online

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The adhesion of Ag films deposited on oxide ceramics can be increased by first depositing intermediate films of active metals such as Ti. Such duplex coatings can be fabricated in a widely used three target sputter deposition system. It is shown here that the beneficial effect of the intermediate Ti film can be defeated by commonly used in situ target and substrate sputter

Title : Deposition of Adherent Ag-Ti Duplex Films on Ceramics in a Multiple-Cathode Sputter Deposition System
Author : National Aeronautics and Space Administration
Language : en
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Type : PDF, ePub, Kindle
Uploaded : Apr 06, 2021

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